Gettering of metals by He induced voids in silicon

Nuclear Inst. and Methods in Physics Research, B

Volumn 96, Issue 1-2, 1995, Pages 249-252

  Raineri, V ^a   Battaglia, A ^b   Rimini, E ^b  

^a CORIMME ^*  (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

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Indexed keywords

EID: 0001678017     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(94)00493-5     Document Type: Article

References (3)