Direct simulation Monte Carlo study of H/H2 and H/H2/CO mixtures for diamond chemical vapor deposition

Journal of Applied Physics

Volumn 80, Issue 11, 1996, Pages 6474-6488

  Sinkovits, Robert S ^a   DeVore, C Richard ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001670688     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363667     Document Type: Article

References (29)

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