Suppression of implantation-induced damage in 6H-SiC by simultaneous excimer laser irradiation during ion implantation

Applied Physics Letters

Volumn 76, Issue 26, 2000, Pages 3867-3869

  Hishida, Yuji ^a   Watanabe, Masanori ^a   Sekine, Kohei ^a   Sugino, Kenichi ^a   Kudo, Jun ^a  

^a Ion Eng Res Institute Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001662846     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.126803     Document Type: Article

References (5)

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4. Y. Hishida, M. Watanabe, K. Nakashima, and O. Eryu, in Silicon Carbide and Related Materials-1999 (Trans Tech Publications, Uetikon a.S., Switzerland, 2000), p. 873.
5. W. J. Choyke and Edward D. Palik, Handbook of Optical Constant of Solids (Academic, New York, 1985), pp. 592.