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Plasma Sources Science and Technology

Volumn 4, Issue 3, 1995, Pages 432-443

Time-resolved power and impedance measurements of pulsed radiofrequency discharges

(2) Overzet, L J a Leong Rousey, F Y a

a UNIVERSITY OF TEXAS AT DALLAS (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001654665 PISSN: 09630252 EISSN: None Source Type: Journal
DOI: 10.1088/0963-0252/4/3/013 Document Type: Article

Times cited : (36)

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