Temperature-Programmed Desorption Study on the Decomposition Mechanism of Ti(OC3H7)4 on Si(100)

Journal of the Electrochemical Society

Volumn 148, Issue 9, 2001, Pages

  Cho, Sung Il ^a   Chung, Chan Hwa ^b   Moon, Sang Heup ^a  

^a Seoul National University   (South Korea)

^b Sungkyunkwan University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001622681     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1386628     Document Type: Article

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