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Physical Review B - Condensed Matter and Materials Physics

Volumn 54, Issue 16, 1996, Pages 11555-11560

Fabrication and physical properties of radio frequency sputtereS thin films

(4) Tsai, C a Chen, S a Chuu, D a Chou, W b

a NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

b CHUNG YUAN CHRISTIAN UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001616113 PISSN: 10980121 EISSN: 1550235X Source Type: Journal
DOI: 10.1103/PhysRevB.54.11555 Document Type: Article

Times cited : (48)

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