Fabrication of periodic Si nanostructure by controlled anodization

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 12 B, 1998, Pages 7186-7189

  Nakagawa, Takashi ^a   Sugiyama, Hisakazu ^a   Koshida, Nobuyoshi ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

Anodization; Magnetic field assisted anodization; Periodic Si nanostructure; Porous silicon

Indexed keywords

EID: 0001605709     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.7186     Document Type: Article

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