0.25μm logic manufacturability using practical 2-D optical proximity correction

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3334, Issue , 1998, Pages 204-214

  Kling, Michael E ^a   Lucas, Kevin D ^a   Reich, Alfred J ^a   Roman, Bernard J ^a   Chuang, Harry ^a   Gilbert, Percy V ^a   Grobman, Warren D ^a   Travis, Edward O ^a   Tsui, Paul ^a   Vuong, Tam ^a   West, Jeff P ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL RESOLVING POWER; THICKNESS MEASUREMENT;

CONVERSION ALGORITHMS; LOGIC PROCESSES; MANUFACTURABILITY; METAL LINES; METAL PATTERNING; OPTICAL PROXIMITY CORRECTION (OPC); PROXIMITY CORRECTIONS;

OPTICAL INSTRUMENTS;

EID: 0001603542     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.310749     Document Type: Conference Paper

References (4)

1. J.Stirniman & M.Rieger, Proc SPIE 2197 (1994)
2. N. B. Cobb et. al., Proc. SPIE 3051 (1997)
3. O.W. Otto et. al., Proc SPIE 2197 (1994)
4. J. F. Chen et. al., Proc. SPIE 3051 (1997)