SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Surface and Coatings Technology

Volumn 99, Issue 1-2, 1998, Pages 184-190

Preparation and characterization of RF-PECVD deposited films containing β-C3N4 microcrystallites

(2) He, J L a Chang, W L a

a FENG CHIA UNIVERSITY (Taiwan)

Author keywords

Characterization; PECVD; C3N4

Indexed keywords

EID: 0001597722 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(97)00526-4 Document Type: Article

Times cited : (21)

References (27)

1
- 20444373328
- A.Y. Liu, M.L. Cohen, Science 245 (1989) 841.
- (1989) Science , vol.245 , pp. 841
- Liu, A.Y.¹ Cohen, M.L.²

2
- 84881192995
- M.Y. Chen, D. Li, X. Lin, V.P. Dravid, Y.W. Chung, M.S. Wong, D. Sproul, J. Vac. Sci. Technol. A 11 (3) (1993) 521.
- (1993) J. Vac. Sci. Technol. A , vol.11 , Issue.3 , pp. 521
- Chen, M.Y.¹ Li, D.² Lin, X.³ Dravid, V.P.⁴ Chung, Y.W.⁵ Wong, M.S.⁶ Sproul, D.⁷

3
- 0042808986
- United States Patent 5,110,679
- E. E. Haller, M. L. Cohen, W. L. Hansen, W. Creek, United States Patent 5,110,679, 1992.
- (1992)
- Haller, E.E.¹ Cohen, M.L.² Hansen, W.L.³ Creek, W.⁴

4
- 21844509437
- A. Bousetta, M. Lu, A. Besaoula, Vac. Sci. Technol. A 13 (3) (1995) 1639.
- (1995) Vac. Sci. Technol. A , vol.13 , Issue.3 , pp. 1639
- Bousetta, A.¹ Lu, M.² Besaoula, A.³

5
- 4243419516
- Z.M. Ren, Y.C. Du, Y. Qiu, J.D. Wu, Z.F. Ying, X.X. Xiong, F.M. Li, Phys. Rev. B 51 (8) (1995) 5274.
- (1995) Phys. Rev. B , vol.51 , Issue.8 , pp. 5274
- Ren, Z.M.¹ Du, Y.C.² Qiu, Y.³ Wu, J.D.⁴ Ying, Z.F.⁵ Xiong, X.X.⁶ Li, F.M.⁷

6
- 0027929813
- C. Charrier, P. Jacquot, E. Denisse, J. Brissot, F. Bossut, A. Amouroux, G. Dervieux, Diamond Relat. Mater. 3 (1993) 41.
- (1993) Diamond Relat. Mater. , vol.3 , pp. 41
- Charrier, C.¹ Jacquot, P.² Denisse, E.³ Brissot, J.⁴ Bossut, F.⁵ Amouroux, A.⁶ Dervieux, G.⁷

7
- 0029358675
- T.Y. Yen, C.P. Chou, Solid State Commun. 95 (5) (1995) 281.
- (1995) Solid State Commun. , vol.95 , Issue.5 , pp. 281
- Yen, T.Y.¹ Chou, C.P.²

8
- 0000797707
- A. Hoffman, R. Brener, I. Gouzman, C. Cytermann, H. Geller, L. Levin, M. Kenny, Diamond Relat. Mater. 4 (1995) 292.
- (1995) Diamond Relat. Mater. , vol.4 , pp. 292
- Hoffman, A.¹ Brener, R.² Gouzman, I.³ Cytermann, C.⁴ Geller, H.⁵ Levin, L.⁶ Kenny, M.⁷

9
- 36449000304
- S.P. Withrow, J.M. Williams, S. Prawer, D. Barbara, J. Appl. Phys. 78 (5) (1995) 3060-3065.
- (1995) J. Appl. Phys. , vol.78 , Issue.5 , pp. 3060-3065
- Withrow, S.P.¹ Williams, J.M.² Prawer, S.³ Barbara, D.⁴

10
- 84907009269
- K.J. Boyd, D. Marton, S.S. Todorov, A.H. Al-Bayati, J. Kulik, R. A Zuhr, J.W. Rabalais, J. Vac. Sci. Technol. A 13 (4) (1995) 2110-2121.
- (1995) J. Vac. Sci. Technol. A , vol.13 , Issue.4 , pp. 2110-2121
- Boyd, K.J.¹ Marton, D.² Todorov, S.S.³ Al-Bayati, A.H.⁴ Kulik, J.⁵ Zuhr, R.A.⁶ Rabalais, J.W.⁷

11
- 0029379190
- L.A. Bursill, J.L. Peng, V.N. Gurarie, A.V. Orlov, S. Prawer, J. Mater. Res. 10 (9) (1995) 2277-2285.
- (1995) J. Mater. Res. , vol.10 , Issue.9 , pp. 2277-2285
- Bursill, L.A.¹ Peng, J.L.² Gurarie, V.N.³ Orlov, A.V.⁴ Prawer, S.⁵

12
- 36449009256
- A. Bousetta, M. Lu, A. Bensaoula, A. Schultz, Appl. Phys. Lett. 65 (6) (1994) 696-698.
- (1994) Appl. Phys. Lett. , vol.65 , Issue.6 , pp. 696-698
- Bousetta, A.¹ Lu, M.² Bensaoula, A.³ Schultz, A.⁴

13
- 0026205046
- M. Ricci, M. Trinquecoste, P. Delhaes, Surf. Coat. Technol. 47 (1991) 299-307.
- (1991) Surf. Coat. Technol. , vol.47 , pp. 299-307
- Ricci, M.¹ Trinquecoste, M.² Delhaes, P.³

14
- 0029373101
- F.L. Freire Jr., G. Mariotto, C.A. Achete, D.F. Franceschini, Surf. Coat. Technol 74/75 (1995) 382.
- (1995) Surf. Coat. Technol , vol.74-75 , pp. 382
- Freire F.L., Jr.¹ Mariotto, G.² Achete, C.A.³ Franceschini, D.F.⁴

15
- 0000286019
- F.L. Freire Jr., G. Mariotto, R.S. Brusa, A. Zecca, C.A. Achete, Diamond Relat. Mater. 4 (1995) 499.
- (1995) Diamond Relat. Mater. , vol.4 , pp. 499
- Freire F.L., Jr.¹ Mariotto, G.² Brusa, R.S.³ Zecca, A.⁴ Achete, C.A.⁵

16
- 0028154209
- E.H.A. Dekempeneer, J. Meneve, J. Smeets, S. Kuypers, L. Eersels, R. Jacobs, Surf. Coat. Technol. 68/69 (1994) 621-625.
- (1994) Surf. Coat. Technol. , vol.68-69 , pp. 621-625
- Dekempeneer, E.H.A.¹ Meneve, J.² Smeets, J.³ Kuypers, S.⁴ Eersels, L.⁵ Jacobs, R.⁶

17
- 0003666038
- Noyes, New York
- S.M. Rossnagel, J.J. Cuomo, W.D. Westwood, Handbook of Plasma Processing Technology, Fundamentals, Etching, Deposition, and Surface Interactions, Noyes, New York, 1990, p. 66.
- (1990) Handbook of Plasma Processing Technology, Fundamentals, Etching, Deposition, and Surface Interactions , pp. 66
- Rossnagel, S.M.¹ Cuomo, J.J.² Westwood, W.D.³

18
- 0024737050
- H.X. Han, B.J. Feldman, G. Fraundorf, P. Fraundorf, Solid State Commun. 71 (10) (1989) 801-803.
- (1989) Solid State Commun. , vol.71 , Issue.10 , pp. 801-803
- Han, H.X.¹ Feldman, B.J.² Fraundorf, G.³ Fraundorf, P.⁴

19
- 0001548543
- J.F. Kaufman, S. Metin, Phys. Rev. B, Third Ser. 39 (18) (1989) 13053.
- (1989) Phys. Rev. B, Third Ser. , vol.39 , Issue.18 , pp. 13053
- Kaufman, J.F.¹ Metin, S.²

20
- 0023983419
- H.X. Man, B.J. Feldman, Solid State Commun. 65 (9) (1988) 921-923.
- (1988) Solid State Commun. , vol.65 , Issue.9 , pp. 921-923
- Man, H.X.¹ Feldman, B.J.²

21
- 21844484392
- D. Li, S. Lopez, Y.W. Chung, M.S. Wong, W.D. Sproul, J. Vac. Sci. Technol. A 13 (3) (1995) 1063.
- (1995) J. Vac. Sci. Technol. A , vol.13 , Issue.3 , pp. 1063
- Li, D.¹ Lopez, S.² Chung, Y.W.³ Wong, M.S.⁴ Sproul, W.D.⁵

22
- 58149323101
- N.V. Novikov, M.A. Voronkin, A.A. Smekhnov, N.I. Zaika, A.P. Zakharchuk, Diamond Relat. Mater. 4 (1995) 390.
- (1995) Diamond Relat. Mater. , vol.4 , pp. 390
- Novikov, N.V.¹ Voronkin, M.A.² Smekhnov, A.A.³ Zaika, N.I.⁴ Zakharchuk, A.P.⁵

23
- 51149218763
- X.A. Zhao, C.W. Ong, Y.C. Tsang, Y.W. Wong, P.W. Chan, C.L. Choy, Appl. Phys. Lett. 66 (20) (1995) 2652.
- (1995) Appl. Phys. Lett. , vol.66 , Issue.20 , pp. 2652
- Zhao, X.A.¹ Ong, C.W.² Tsang, Y.C.³ Wong, Y.W.⁴ Chan, P.W.⁵ Choy, C.L.⁶

24
- 0003230271
- M.R. Wixom, J. Am. Ceram. Soc. 73 (1990) 1686.
- (1990) J. Am. Ceram. Soc. , vol.73 , pp. 1686
- Wixom, M.R.¹

25
- 12044253618
- D. Marton, K.J. Boyd, A.H. Al-Bayati, S.S. Todorov, J.W. Rabalais, Phys. Rev. Lett. 73 (1) (1994) 118.
- (1994) Phys. Rev. Lett. , vol.73 , Issue.1 , pp. 118
- Marton, D.¹ Boyd, K.J.² Al-Bayati, A.H.³ Todorov, S.S.⁴ Rabalais, J.W.⁵

26
- 0642342724
- X.W. Su, H.W. Song, F.Z. Cui, W.Z. Li, J. Phys.: Condens. Mater. 7 (1995) L517-L522.
- (1995) J. Phys.: Condens. Mater. , vol.7
- Su, X.W.¹ Song, H.W.² Cui, F.Z.³ Li, W.Z.⁴

27
- 0029219919
- J.P. Riviere, D. Texier, J. Delafond, M. Jaouen, E.L, Mathe, J. Chaumont, Mater. Lett. 22 (1995) 115-118.
- (1995) Mater. Lett. , vol.22 , pp. 115-118
- Riviere, J.P.¹ Texier, D.² Delafond, J.³ Jaouen, M.⁴ Mathe, E.L.⁵ Chaumont, J.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.