Synthesis of TiN and TiNxCy: Optimization of reaction parameters

Materials Science and Engineering: A

Volumn 209, Issue 1-2, 1996, Pages 345-352

  Shaviv, Roey ^a,b  

^a IMI TAMI Institute for Research and Development Ltd   (Israel)

^b Tower Semiconductors Ltd   (Israel)

Author keywords

Reaction parameters; Titanium carbide; Titanium nitride

Indexed keywords

IMPURITIES; MORPHOLOGY; OPTIMIZATION; SYNTHESIS (CHEMICAL); TITANIUM CARBIDE;

REACTION PARAMETERS OPTIMIZATION;

TITANIUM NITRIDE;

EID: 0001584562     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-5093(95)10125-x     Document Type: Article

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