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Journal of Applied Physics

Volumn 60, Issue 8, 1986, Pages 2771-2774

Spatially resolved detection of O atoms in etching plasmas by two-photon laser-induced fluorescence

(1) Selwyn, Gary S a

a IBM (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001575469 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.337109 Document Type: Article

Times cited : (50)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.