Laser assisted chemical vapour deposition of silicon oxide layers

Journal of Luminescence

Volumn 80, Issue 1-4, 1998, Pages 141-145

  Paiva, P ^a   Madelino, F ^a   Conde, O ^a  

^a UNIVERSITY OF LISBON   (Portugal)

Author keywords

Chemical vapour deposition; Photothermal laser CVD; Porous silicon; Silicon dioxide

Indexed keywords

EID: 0001571480     PISSN: 00222313     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-2313(98)00085-4     Document Type: Article

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