Electrostatic wafer chuck for electron beam microfabrication

Review of Scientific Instruments

Volumn 44, Issue 10, 1973, Pages 1506-1509

  Wardly, George A ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001565375     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1685985     Document Type: Article

References (3)