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Volumn 69, Issue 7, 1999, Pages

Nanosecond UV laser damage and ablation from fluoride crystals polished by different techniques

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0001542503     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390051520     Document Type: Article
Times cited : (35)

References (17)
  • 5
    • 25844505055 scopus 로고    scopus 로고
    • IBM J. Res. Devel. 41(1-2), 1997 is a compilation of several articles about topics related to laser lithography at 193 nm
    • (1997) IBM J. Res. Devel. , vol.41 , Issue.1-2
  • 6
    • 0032225556 scopus 로고    scopus 로고
    • Nanosecond UV laser pulse interactions with dielectric single crystals
    • J.J. Dubowski, P.E. Dyer (Eds.): Laser Appl. in Microelectronic and Optoelectronic Manufacturing III, SPIE, Bellingham
    • M. Reichling: Nanosecond UV laser pulse interactions with dielectric single crystals, J.J. Dubowski, P.E. Dyer (Eds.): In Laser Appl. in Microelectronic and Optoelectronic Manufacturing III, SPIE Proc. Vol. 3274 (SPIE, Bellingham 1998) p. 2
    • (1998) SPIE Proc. , vol.3274 , pp. 2
    • Reichling, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.