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5
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25844505055
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IBM J. Res. Devel. 41(1-2), 1997 is a compilation of several articles about topics related to laser lithography at 193 nm
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IBM J. Res. Devel.
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6
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0032225556
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Nanosecond UV laser pulse interactions with dielectric single crystals
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J.J. Dubowski, P.E. Dyer (Eds.): Laser Appl. in Microelectronic and Optoelectronic Manufacturing III, SPIE, Bellingham
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M. Reichling: Nanosecond UV laser pulse interactions with dielectric single crystals, J.J. Dubowski, P.E. Dyer (Eds.): In Laser Appl. in Microelectronic and Optoelectronic Manufacturing III, SPIE Proc. Vol. 3274 (SPIE, Bellingham 1998) p. 2
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Reichling, M.1
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0030217334
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Sect. B
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S. Gogoll, E. Stenzel, H. Johansen, M. Reichling, E. Matthias: Nucl. Instrum. Methods Phys. Res., Sect. B 116, 279 (1996)
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Gogoll, S.1
Stenzel, E.2
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0030563080
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S. Gogoll, E. Stenzel, M. Reichling, H. Johansen, E. Matthias: Appl. Surf. Sci 96-98, 332 (1996)
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Appl. Surf. Sci
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Gogoll, S.1
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0031079290
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E. Stenzel, S. Gogoll, J. Sils, M. Huisinga, H. Johansen, G. Kästner, M. Reichling, E. Matthias: Appl. Surf. Sci. 109-110, 162 (1997)
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Appl. Surf. Sci.
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Stenzel, E.1
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Reichling, M.7
Matthias, E.8
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10
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0029539692
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H. Johansen, S. Gogoll, E. Stenzel, M. Reichling, E. Matthias: Rad. Eff. Def. Sol. 136, 151 (1995)
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0000447968
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S. Petzoldt, A.P. Elg, M. Reichling, J. Reif, E. Matthias: Appl. Phys. Lett. 53(21), 2005 (1988).
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0029219873
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E. Matthias, J. Siegel, S. Petzoldt, M. Reichling, H. Skurk, O. Käding, E. Neske: Thin Solid Films 254, 139 (1995)
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Thin Solid Films
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Neske, E.7
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15
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0031400035
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H. Johansen, W. Erfurth, S. Gogol, E. Stenzel, M. Reichling, E. Matthias: Scanning 19, 416 (1997)
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Scanning
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Johansen, H.1
Erfurth, W.2
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16
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57849108583
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2 at 248 nm
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H.E. Bennett, A.H. Guenther, M. Kozlowski, B.E. Newnam, M.J. Soileau (Eds.): SPIE, Bellingham
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2 at 248 nm, in H.E. Bennett, A.H. Guenther, M. Kozlowski, B.E. Newnam, M.J. Soileau (Eds.): Laser-Induced Damage in Optical Materials 1995, SPIE Vol. 2714 (SPIE, Bellingham 1996) p. 260
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Laser-Induced Damage in Optical Materials 1995, SPIE
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