Physical limits on gigascale integration

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 192-195

  Meindl, James D ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001535257     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589027     Document Type: Article

References (10)

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3. D. Halliday, R. Reswick, and J. Walker, Fundamentals of Physics, 4th ed. (Wiley, New York, 1993), p. 623.
4. R. Laudauer, Nature, 335, 779 (1988).
5. M. Ono, M. Saito, T. Yoshitomi, L. Fiegna, T. Ohguro, and H. Iwai, 1993 IEEE IEDM Technical Digest (IEEE, New York, 1993), pp. 119-122.
6. B. Agrawal, V. De, and J. Meindl, in Proceedings of ESSDERC '93, edited by J. Borel (Frontiers, Grenoble, France, 1993) pp. 919-926.
7. V. De, B. Agrawal, and J. Meindl, 1993 IEEE IEDM Technical Digest (IEEE, New York, 1993), pp. 717-720.
8. H. W. Wong and Y. Taur, 1993 IEEE IEDM Technical Digest (IEEE, New York, 1993), pp. 705-708.
9. H. B. Bakoglu and J. D. Meindl, IEEE Trans. Electron Devices ED-32, 903 (1985).
10. p, where K and p are empirically determined constants.