Sub-Nyquist interferometry: Implementation and measurement capability

Optical Engineering

Volumn 35, Issue 10, 1996, Pages 2962-2969

  Greivenkamp, John E ^a,d   Lowman, Andrew E ^b,d   Palum, Russell J ^c,d  

^a UNIVERSITY OF ARIZONA   (United States)

^b Leica Geosystems AG   (Switzerland)

^c EASTMAN KODAK COMPANY   (United States)

^d SPIE ^*

Author keywords

Aspheres; Interferometry; Metrology; Optical testing; Phase shifting interferometry

Indexed keywords

EID: 0001517360     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.600991     Document Type: Article

References (14)

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