Automated high-speed Mueller matrix scatterometer

Applied Optics

Volumn 36, Issue 22, 1997, Pages 5388-5395

  Delplancke, F ^a  

^a UNIVERSITÉ LIBRE DE BRUXELLES   (Belgium)

Author keywords

Industrial control; Mueller matrix; Polarimetry; Polarization; Scatterometry; Surface roughness

Indexed keywords

EID: 0001517329     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.005388     Document Type: Article

References (19)

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