On the possibility of chemo-mechanical action in magnetic float polishing of silicon nitride

Journal of Tribology

Volumn 118, Issue 4, 1996, Pages 721-727

  Komanduri, R ^a,b   Umehara, N ^b   Raghunandan, M ^b  

^a ASME

^b Oklahoma State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001512828     PISSN: 07424787     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2831600     Document Type: Article

References (45)

1. 4 in Rolling-Sliding Contact," Wear, Vol. 124, pp. 123-132.
2. Akazawa, M., Kato, K., and Umeya, K., 1986, "Wear Properties of Silicon Nitride in Rolling Contact," Wear, Vol. 110, pp. 285-293.
3. Bifano, T. G., Dow, T. A., and Scattergood, R. O., 1991, "Ductile Regime Grinding: A New Technology for Machining Brittle Materials," ASME JOURNAL OF TRIBOLOGY, Vol. 113, pp. 184-189.
4. Childs, T. H. C., Jones, D. A., Mahmood, S., Kato, K., Zhang, B., and Umehara, N., 1994a, "Magnetic Fluid Grinding Mechanics," Wear, Vol. 175, pp. 189-198.
5. Childs, T. H. C., Mahmood, S., and Yoon, H. J., 1994b, "The Material Removal Mechanism in Magnetic Fluid Grinding of Ceramic Ball Bearings," Proc. of the I. Mech. E., Vol. 208 B1, pp. 47-59.
6. Danyuluk, S., Park, D. S., and McNallan, M., 1993, "Friction and Wear of Silicon Nitride Exposed to Moisture at High Temperatures," Friction and Wear of Ceramics, (Ed. S. Jahanmir), Marcel Dekker, New York.
7. Dong, X., and Jahanmir, S., 1993, "Wear Transition Diagram of Silicon Nitride," Wear, Vol. 165, pp. 169-180.
8. Fischer, T. E., and Tomizawa, H., 1985, "Interaction of Tribo-chemistry and Microfracture in the Friction and Wear of Silicon Nitride," Wear, Vol. 105, pp. 29-45.
9. Fischer, T. E., and Mullins, W. M., 1993, "Relation Between Surface Chemistry and Tribology of Ceramics," in "Friction and Wear of Ceramics," ed, S. Jahanmir, Marcel Dekker, New York.
10. Fischer, T. E., 1988, "Tribochemistry," Ann. Rev. Mater. Sci., Vol. 18, pp. 303-323.
11. Gee, M. G., 1992, "The Formation of Glass in the Wear of Reaction-Bonded Silicon Nitride," J. Phys. D. App. Phy., Vol. 25, pp. A182-A188.
12. Heinicke, G., 1984, Tribochemistry; Carl Hanswe Verlag, Munich.
13. Jahanmir, S., 1993, Friction and Wear of Ceramics, Marcel Dekker, New York.
14. Jahanmir, S., and Fischer, T. E., 1987, "Friction and Wear of Silicon Nitride Lubricated by Humid Air, Water, Hexadecane and Hexadecane + 0.5 percent Stearic Acid," Trans STLE, Vol. 31, 1 pp. 32-43.
15. Jahanmir, S., Ives, L. K., Ruff, W. A., and Peterson, M. B., 1992, "Ceramic Machining: Assessment of Current Practice and Research Needs in the United States," NIST Special Publication No. 834, U.S. Government Printing Office, Washington, D.C.
16. 2O in the Wet Grinding of Silicon Nitride Powder," Yog Yo-K yokai-Shi, Vol. 91, p. 386.
17. Kapsa, P., and Kanemura, Y., 1988, "Sliding Damage on Hot-Pressed and Sintered Silicon Nitride Caused by a Diamond Tip Under Controlled Humidity," Wear, Vol. 127, pp. 65-83.
18. Karaki-Doy, T., 1993, "Study on Mechanism of Mechano-chemical Polishing and its Application - An Instance of Silicon Wafers," J. of Saitama Univ., Faculty of Education (Mathematical and Natural Science) Vol. 42 (1), pp. 33-47.
19. Kashiwagura, N., Harada, J., and Ogino, M., 1983, "Characterization of Mechanochemically Polished (111) Surface of Silicon by Diffuse X-Ray Scattering," J. Appl. Phys., Vol. 54, [5], pp. 2706-2710.
20. Kato, K., 1990, "Tribology of Ceramics," Wear, Vol. 136, pp. 117-133.
21. Kawata, K., and Tani, Y., 1993, "Development of High-Concentration Lapping Discs with Low Bonding Strength and Their Application to Mirror Finishing of Brittle Materials," JSME Int. Journal, Series C, Vol. 36, 2, pp. 264-270.
22. Kikuchi, M., Takahashi, Y., Suga, T., Suzuki, S., and Bando, Y., 1992, "Mechanochemical Polishing of Silicon Carbide Single Crystal with Chromium(III) Oxide Abrasive," J. Amer. Ceram. Soc., Vol. 75, 1, pp. 189-195.
23. Kikuchi, M., Takahashi, Y., Suga, T., Suzuki, S., and Yasunaga, N., 1990, "Mechanochemical Polishing of Silicon Carbide," Proc. Fall Meeting of JSPE, pp. 327-328 (in Japanese).
24. Kim, S. S., Kato, K., Hokkirigawa, K., and Abe, H., 1986, "Wear Mechanism of Ceramic Materials in Dry Rolling Friction," ASME JOURNAL OF TRIBOLOGY, Vol. 108 Oct., pp. 522-526.
25. Namba, Y., and Tsuwa, H., 1978, "Mechanisms and Some Applications of Ultrafine Finishing," Annals of the CIRP, Vol. 27/1, pp. 511-516.
26. Namba, Y., and Tsuwa, H., 1977, "Ultrafine Finishing of Sapphire Single Crystal," Annals of the CIRP, Vol. 26/1, p. 325.
27. Raghunandan, M., Umehara, N., Noori-khajavi, N., and Komanduri, R., 1995, "Magnetic Float Polishing of Advanced Ceramics," accepted for publication, Trans ASME, J. of Eng. for Ind.
28. Singhal, S. C., 1975, "Effect of Water Vapor on the Oxidation of Hot-Pressed Silicon Nitride and Silicon Carbide," J. Am. Cer. Soc., Vol. 58, p. 17.
29. Subramanian, K., and Ramanath, S., 1992, "Mechanisms of Material Removal in the Grinding of Ceramics," Proc. of the Symposium on Precision Machining, ASME Publication PED-58.
30. Suga, T., Suzuki, S., and Miyazawa, K., 1989, "Mechanochemical Polishing of Sintered Silicon Nitride," J. JSPE, Vol. 55, 12, pp. 2247-2253 (in Japanese).
31. Sugita, T., Ueda, K., and Kanemura, Y., 1984, "Material Removal Mechanism of Silicon Nitride During Rubbing in Water," Wear, Vol. 97, pp. 1-8.
32. Suzuki, K., Uematsu, T., Ohashi, H., Kitajima, K., Suga, T., and Imanaka, O., 1992, "Development of a New Mechanochemical Polishing Method with a Polishing Film for Ceramic Round Bar," Annals of the CIRP, Vol. 41/1, pp. 339-342.
33. Tani, Y., and Kawata, K., 1984, "Development of High-Efficient Fine Finishing Process Using Magnetic Fluid," Annals of CIRP, Vol. 33/1, pp. 217-220.
34. Tomizawa, H., and Fischer, T. E., 1986, "Friction and Wear of Silicon Nitride and Silicon Carbide in Water: Hydrodynamic Lubrication at Low Sliding Speeds Obtained by Tribochemical Wear," Trans ASLE, Vol. 30, (1), pp. 41-46.
35. Uematsu, T., Suzuki, K., Wu, M. H., Suzuki, K., and Imanaka, O., 1993, "Efficient Mechanochemical Polishing for Silicon Nitride Ceramics," Machining of Advanced Materials, NIST Special Publication No. 847 (edited by S. Jahanmir) pp. 409-413.
36. Umehara, N., and Kato, K., 1990, "Principles of Magnetic Fluid Grinding of Ceramic Balls," Applied Electromagnetics in Materials, Vol. 1, pp. 37-43.
37. Umehara, N., 1988, "Study on Magnetic Fluid Grinding," Ph.D. thesis, Tohoku University, Sendai, Japan (in Japanese).
38. Vora, H., Orent, T. W., and Stokes, R. J., 1982, "Mechano-Chemical Polishing of Silicon Nitride," J. Amer. Ceram. Soc., Vol. 65, 9, pp. C140-C141.
39. Vora, H., and Stokes, R. J., 1983, "Study of Mechano-Chemical Machining of Ceramics and the Effect on Thin Film Behavior," Rept. No. N00014-80-C-0437-2.
40. Whittledon, E. P., Ives, L. K., and Peterson, M. B., 1993, "Surface Damage and Mechanics of Fretting Wear in Ceramics," Friction and Wear of Ceramics, Ed. S. Jahanmir, Marcel Dekker, New York.
41. Xu, H. K. K., and Jahanmir, S., 1994, "Simple Technique for Observing Subsurface Damage in Machining Ceramics," J. Amer. Cer. Soc., Vol. 77 [5], pp. 1388-90.
42. Yasunaga, N., Tarumi, N., Obara, A., and Imanaka, O., 1979, "Mechanism and Application of the Mechanochemical Polishing Method Using Soft Powder," Science of Ceramic Machining and Surface Finishing II, ed. B. J. Hockey, and R. W. Rice, NBS Special Publication No. 562, p. 171.
43. Yasunaga, N., Obara, A., and Imanaka, O., 1978, "Study of Mechanochemical Effect on Wear and Its Application to Surface Finishing," J. of JSPE, Vol. 44, pp. 77-83 (in Japanese).
44. Yasunaga, N., Obara, A., and Tarumi, N., 1977, "Study of Mechanochemical Effect on Wear and Its Application to Surface Finishing," Res. Electrotech. Lab. Vol. 776, pp. 50-134 (in Japanese).
45. Yoshikawa, H., 1967, "Brittle-Ductile Behavior of Crystal Surface in Finishing," J. Japan Society for Precision Engineering (JSPE), Vol. 35, (10) Oct. pp. 662-667 (in Japanese).