Correlation between the early stage of copper metal organic chemical vapor deposition and the material properties of thin film

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3015-3020

  Hwang, Eui Seong ^a   Lee, Jihwa ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001508957     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590335     Document Type: Article

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