Transport of ions during ion implantation

Physical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics

Volumn 54, Issue 1, 1996, Pages 938-945

  Parker, G J ^a,b   Hitchon, W N G ^a,b   Keiter, E R ^a,b  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001498690     PISSN: 1063651X     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevE.54.938     Document Type: Article

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