Adsorption studies of digermane and disilane on Ge(100)

Surface and Interface Analysis

Volumn 29, Issue 3, 2000, Pages 194-200

  Ateca, S ^a   Bater, C ^a   Sanders, M ^a   Craig Jr , J H ^a  

^a UNIVERSITY OF TEXAS AT EL PASO   (United States)

Author keywords

Adsorption; Digermane; Dihydride; Disilane; Electron stimulated desorption (ESD); Ge(100); Monohydride; Temperature programmed desorption (TPD)

Indexed keywords

EID: 0001491014     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(200003)29:3<194::AID-SIA682>3.0.CO;2-T     Document Type: Article

References (19)

1. Mahajan A, Kellerman BK, Heitzinger JM, Banerjee S, Tasch A, White JM, Ekerdt JG. J. Vac. Sci. Technol. A 1995; 13: 1464.
2. Cohen SM, Yang YL, Rouchouze E, Jin T, D'Evelyn MP. J. Vac. Sci. Technol. A 1992; 10: 2168.
3. Yanovskii AS, Gerchikov MY, Panesh AM, Simonov AP. Sov. Tech. Phys. Lett. 1987; 13: 123.
4. Cho H. Appl. Surf. Sci. 1996; 92: 129.
5. Boishin G, Surnev L. Surf. Sci. 1996; 345: 64.
6. Ning BMH, Crowell JE. Surf. Sci. 1993; 295: 79.
7. Russell NM, Ekerdt JG. Surf. Sci. 1996; 369: 51.
8. Wu YM, Nix RM. Surf. Sci. 1994; 306: 59.
9. Papagno L, Shen XY, Anderson J, Schirripa Spagnolo G, Lapeyre GJ. Phys. Rev. B 1996; 34: 7188.
10. Chabal YJ. Surf. Sci. 1986; 168: 594.
11. Lozano J, Craig Jr JH, Campbell JH, Ascherl MV. Nucl. Instrum. Methods Phys. Rev. B 1995; 100: 407.
12. Tsu R, Lubben D, Bramblett TR, Greene JE. Surf. Sci. 1993; 280: 265.
13. Craig Jr JH, Durrer WG. J. Vac. Sci. Technol. A 1989; 7: 3337.
14. Nishijima M, Propst FM. Phys. Rev. B 1970; 2: 2368.
15. Xia B, Fain Jr SC. Phys. Rev. B 1994; 50: 14565.
16. Crawford VA, Rhee KE, Wilson MK. J. Chem. Phys. 1962; 37: 2380.
17. Dows DA, Hexter RM. J. Chem. Phys. 1956; 24: 1030.
18. Lin D-S, Miller T, Chiang TC. Phys. Rev. B 1992; 45: 11415.
19. Hoeven AJ, Alarts J, Larsen PK. J. Vac. Sci. Technol. A 1989; 7: 5.