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Applied Physics Letters

Volumn 64, Issue 15, 1994, Pages 1932-1934

Fabrication of Si nanostructures with an atomic force microscope

(2) Snow, E S a Campbell, P M a

a NAVAL RESEARCH LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001488961 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.111746 Document Type: Article

Times cited : (399)

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- The AFM and SEM linewidths are consistent when the tip shape (for this image a nominal 10 nm radius tip was used) is included in the analysis of the AFM data

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- Since the experiments are performed in an air environment, the exact source of the [formula omitted] ions is unknown. Experiments performed in controlled environments, i.e., known content of [formula omitted] [formula omitted] etc., are planned

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