Thin film deposition of GexCyHz by radiolysis of GeH4-C3H8 mixtures

Journal of Materials Chemistry

Volumn 6, Issue 9, 1996, Pages 1507-1509

  Benzi, Paola ^a  

^a UNIVERSITY OF TURIN   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001462019     PISSN: 09599428     EISSN: None     Source Type: Journal    
DOI: 10.1039/JM9960601507     Document Type: Article

References (4)

1. H. Yuan and R. S. Williams, Chem. Mater., 1993, 5, 479.
2. D. A. Anderson and W. E. Spear, Philos. Mag., 1977, 35, 1.
3. D. C. Booth and K. J. Voss, J. Phys., 1981, 42, C4-1033.
4. M. Gazicki, A. Jachimowicz, R. Schallauer, K. Pirker, W. Fallmann, F. Kohl, F. Olcaytug and G. Urban, J. Appl. Polym. Sci.: Appl Polym. Symp., 1990, 46, 137.