Plume formation and optical breakdown on KrF excimer laser irradiated silica glass

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4274, Issue , 2001, Pages 258-265

  Kawaguchi, Y ^a   Langford, S C ^b   Dickinson, J T ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b WASHINGTON STATE UNIVERSITY   (United States)

Author keywords

Defect; KrF excimer laser; Optical breakdown; Plume; Silica glass

Indexed keywords

ATOM LASERS; DEFECTS; EXCIMER LASERS; FUSED SILICA; GLASS; LASER APPLICATIONS; LUMINESCENCE; MANUFACTURE; MICROELECTRONICS; MICROMETERS; SILICA;

DAMAGED REGION; IRREGULAR SHAPE; KRF EXCIMER LASER; LUMINESCENCE SPECTROSCOPY; LUMINESCENCE SPECTRUM; OPTICAL BREAKDOWN; PLUME; SYNTHETIC SILICA GLASS;

FLUORINE COMPOUNDS;

EID: 0001451481     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.432517     Document Type: Conference Paper

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