Surface roughness measurement by means of polychromatic speckle elongation

Applied Optics

Volumn 36, Issue 10, 1997, Pages 2188-2197

  Lehmann, Peter ^a   Patzelt, Stefan ^a   Schöne, Armin ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

In process measurement; Polychromatic light scattering; Speckle elongation; Speckle intensity correlation; Surface roughness

Indexed keywords

EID: 0001451465     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.002188     Document Type: Article

References (34)

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