Increased uniformity and thermal stability of CoSi2 thin films by Ti capping

Applied Physics Letters

Volumn 67, Issue , 1995, Pages 2164-

  Tung, R T ^a   Schrey, F ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001448053     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.114754     Document Type: Article

References (0)