SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Applied Physics Letters

Volumn 55, Issue 19, 1989, Pages 1960-1962

Universal energy dependence of physical and ion-enhanced chemical etch yields at low ion energy

(1) Steinbrüchel, Christoph a

a RENSSELAER POLYTECHNIC INSTITUTE (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001442869 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.102336 Document Type: Article

Times cited : (267)

References (28)

1
- 0001099030
- (1988) J. Vac. Sci. Technol. A , vol.6 , pp. 1621
- Roy, R.A.¹ Cuomo, J.J.² Yee, D.S.³

2
- 0004612791
- (1988) Appl. Phys. Lett , vol.53 , pp. 364
- Qhmi, T.¹ Matsudo, K.² Shibata, T.³ Ichikawa, T.⁴ Iwabuchi, H.⁵

3
- 0003921499
- edited by N. G. Einspruch and D. M. Brown (Academic, New York)
- (1984) VLSI Electronics Microstructure Science , pp. 190-252
- Flamm, D.L.¹ Donnelly, V.M.² Ibbotson, D.E.³

4
- 0022696487
- (1986) J. Electrochem. Soc , vol.133 , pp. 784
- Pang, S.W.¹

5
- 0020736395
- (1983) J. Vac. Sci. Technol. B , vol.1 , pp. 469
- Winters, H.F.¹ Coburn, J.W.² Chuang, T.J.³

6
- 0003127712
- edited by R. Behrisch (Springer, Berlin)
- (1981) Sputtering by Ion Bombardment I, Vol. 47 of Topics in Applied Physics , pp. 9
- Sigmund, P.¹

7
- 34548135181
- (1977) Phys. Rev , vol.15 , pp. 2458
- Wilson, W.D.¹ Haggmark, L.G.² Biersack, J.P.³

8
- 0001385222
- (1984) J. Vac. Sci. Technol. B , vol.2 , pp. 151
- Zalm, P.C.¹

9
- 4344647163
- (1987) Phys. Rev. B , vol.35 , pp. 2174
- Winters, H.F.¹ Taglauer, E.²

10
- 0019236110
- (1980) Radiat Eff. Lett , vol.57 , pp. 15
- Matsunami, N.¹ Yamamura, Y.² Itikawa, Y.³ Itoh, N.⁴ Kazumata, Y.⁵ Miyagawa, S.⁶ Morita, M.⁷ Shimizu, R.⁸

11
- 0020270534
- (1982) Radiat. Eff. Lett , vol.68 , pp. 83
- Yamamura, Y.¹ Matsunami, N.² Itoh, N.³

12
- 0001050803
- (1984) Nucl. Instrum. Methods B , vol.2 , pp. 587
- Bohdansky, J.¹

13
- 84952849377
- (unpublished).
- Steinbrüchel, C.¹

14
- 0014531308
- (1969) J. Appl. Phys , vol.40 , pp. 2911
- Hayward, W.H.¹ Wolter, A.R.²

15
- 0017980952
- (1978) Appl. Phys , vol.16 , pp. 147
- Hechtl, E.¹ Bay, H.L.² Bohdansky, J.³

16
- 0020814156
- (1983) Jpn. J. Appl. Phys , vol.22 , pp. 1361
- Saidoh, M.¹ Sone, K.²

17
- 36849142077
- (1961) J. Appl. Phys , vol.32 , pp. 365
- Laegreid, N.¹ Wehner, G.K.²

18
- 0021784525
- (1985) Appl. Phys. A , vol.36 , pp. 37
- Steinbrüchel, C.¹

19
- 84946162847
- (1981) Jpn. J. Appl. Phys , vol.20 , pp. L411
- Tachi, S.¹ Miyake, K.² Tokuyama, T.³

20
- 84931484367
- Suppl. 21-1
- (1983) Jpn. J. Appl. Phys , vol.21 , pp. 141
- Tachi, S.¹ Miyake, K.² Tokuyama, T.³

21
- 0001153540
- (1987) Appl. Phys. Lett , vol.50 , pp. 1506
- Oostra, D.J.¹ van Ingen, R.P.² Haring, A.³ de Vries, A.E.⁴ van Veen, G.N.A.⁵

22
- 0019565711
- (1981) J. Electrochem. Soc , vol.129 , pp. 1077
- Harper, J.M.E.¹ Cuomo, J.J.² Leary, P.A.³ Summa, G.M.⁴ Kaufman, H.R.⁵ Bresnock, F.J.⁶

23
- 0001702097
- (1989) Mater. Res. Soc. Symp. Proc , vol.129 , pp. 477
- Steinbrüchel, C.¹

24
- 0021427430
- (1984) J. Appl. Phys , vol.55 , pp. 3813
- Kolfschoten, A.W.¹ Haring, R.A.² Karing, A.³ de Vries, A.E.⁴

25
- 0021783770
- (1985) J. Electrochem. Soc , vol.132 , pp. 180
- Steinbrüchel, C.¹ Lehmann, H.W.² Frick, K.³

26
- 0018986235
- (1981) J. Vac. Sci. Technol , vol.18 , pp. 349
- Mayer, T.M.¹ Barker, R.A.² Whitman, L.J.³

27
- 0001274743
- (1981) Jpn. J. Appl. Phys , vol.20 , pp. 2429
- Okano, H.¹ Horüke, Y.²

28
- 0022025679
- (1985) Nucl. Instrum. Methods B , vol.7-8 , pp. 825
- Mizutani, T.¹ Dale, C.J.² Chu, W.K.³ Mayer, T.M.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.