Automatic classification of spatial signatures on semiconductor wafer maps

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3050, Issue , 1997, Pages 434-444

  Tobin Jr , Kenneth W ^a   Gleason, Shaun S ^a   Karnowski, Thomas P ^a   Cohen, Susan L ^b   Lakhani, Fred ^b  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b SEMATECH   (United States)

Author keywords

Automatic inspection; Classifier training; Fuzzy classifier; Pattern recognition; Semiconductor; Spatial signature; Wafermap analysis

Indexed keywords

AUTOMATIC INDEXING; CLASSIFIERS; DEFECTS; ELECTRIC CONDUCTIVITY; FUZZY SYSTEMS; INSPECTION; LEARNING SYSTEMS; PATTERN RECOGNITION; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR MATERIALS;

AUTOMATIC INSPECTION; CLASSIFIER TRAINING; FUZZY CLASSIFIER; SEMICONDUCTOR; SPATIAL SIGNATURE; WAFERMAP ANALYSIS;

PROCESS CONTROL;

EID: 0001439064     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.275936     Document Type: Conference Paper

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