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Journal of Applied Physics
Volumn 77, Issue 12, 1995, Pages 6181-6187
O2 rf discharge structure in parallel plates reactor at 13.56 MHz for material processing
(3)
Shibata, Mari
a
Nakano, Nobuhiko
a
Makabe, Toshiaki
a
a
KEIO UNIVERSITY
(
Japan
)
Author keywords
[No Author keywords available]
Indexed keywords
EID
:
0001414126
PISSN
:
00218979
EISSN
:
None
Source Type
:
Journal
DOI
:
10.1063/1.359144
Document Type
:
Article
Times cited : (
68
)
References (
27
)
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