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Volumn 74, Issue 9, 1993, Pages 5781-5789

Deposition of high quality TiN films by excimer laser ablation in reactive gas

(13) Mihailescu, I N a Chitica, N a Nistor, L C a Popescu, M a Teodorescu, V S a Ursu, I a Andrei, A b Barborica, A c Luches, A d De Giorgi, M Luisa d Perrone, A d Dubreuil, B e Hermann, J e

a INSTITUTE OF ATOMIC PHYSICS (Romania)

b INSTITUTE FOR NUCLEAR RESEARCH (Romania)

c UNIVERSITY OF BUCHAREST (Romania)

d UNIVERSITY OF SALENTO (Italy)

e UNIVERSITÉ D'ORLÉANS (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001402101 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.354198 Document Type: Article

Times cited : (59)

References (40)

1
- 0002021077
- (1985) Thin Solid Films , vol.128 , pp. 45
- Sundgren, J-E.¹

2
- 0001695736
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2770
- Sundgren, J-E.¹ Rockett, A.² Green, J.E.³ Helmersson, U.⁴

3
- 0018000998
- (1978) Thin Solid Films , vol.52 , pp. 415
- Nicolet, M.A.¹

4
- 0006317969
- (1983) SPIE Proc , vol.401 , pp. 323
- Karlsson, B.¹ Sundgren, J.-E.² Johansson, B.-O.³

5
- 0019609637
- (1981) J. Appl. Phys , vol.52 , pp. 5722
- Wittmer, M.¹ Studer, B.² Melchior, H.³

6
- 57849122054
- (1984) J. Vac. Sci. Technol. A , vol.2 , pp. 273
- Wittmer, M.¹

7
- 0004024208
- Nov.
- (1990) Semiconductor International , pp. 100
- Hems, J.¹

8
- 0006376693
- (1987) Appl. Phys. Lett , vol.50 , pp. 445
- Zang, L.C.¹ Cheung, S.K.² Liang, C.L.³ Cheung, N.W.⁴

9
- 84950548079
- Strasbourg, France, Sept. 1991, edited by Soc. Francaise du Vide (Le Vide, les Couches Minces), (in English)
- (1991) Proceedings of the Third International Symposium on Trends and New Applications in Thin Films , vol.259 , pp. 205
- Chen, Y.M.¹ Pavy, J.C.² Peyre, J.P.³ Rigant, B.⁴

10
- 85041869922
- ibid , pp. 62
- Dupont, F.¹ Bergmann, E.²

11
- 85041884886
- (1981) Appl. Phys. Lett , vol.52 , pp. 5722
- Craciun, V.¹ Mihailescu, I.N.² Ursu, I.³ Craciunoiu, F.⁴ Corici, A.⁵ Leggieri, G.⁶ Luches, A.⁷ Nassisi, V.⁸ Martino, M.⁹

12
- 0000132739
- (1985) J. Vac. Sci. Technol. A , vol.3 , pp. 2237
- Armigliato, A.¹ Finetti, M.² Garrido, J.³ Guerri, S.⁴ Ostoja, P.⁵ Scorzoni, A.⁶

13
- 0020135740
- (1982) J. Vac. Sci. Technol , vol.21 , pp. 14
- Ting, C.Y.¹

14
- 0019586344
- (1982) Thin Solid Films , vol.93 , pp. 397
- Wittmer, M.¹ Melchior, M.²

15
- 78650224871
- (1985) J. Vac. Sci. Technol. A , vol.3 , pp. 1797
- Wittmer, M.¹

16
- 0019073814
- (1980) Thin Solid Films , vol.72 , pp. 535
- Aronson, A.J.¹ Chen, D.² Class, W.H.³

17
- 0019077478
- (1980) Thin Solid Films , vol.72 , pp. 541
- Matthews, A.¹ Teer, D.G.²

18
- 0019081825
- (1980) Thin Solid Films , vol.73 , pp. 267
- Ramalingam, S.¹ Winer, W.O.²

19
- 36449007813
- (1992) Appl. Phys. Lett , vol.61 , pp. 1290
- Narayan, J.¹ Tiwari, P.² Chen, X.³ Singh, J.⁴ Chowdhurty, R.⁵ Zheleva, T.⁶

20
- 25844466138
- (1990) J. Appl. Phys , vol.68 , pp. 2509
- Craciun, V.¹ Mihailescu, I.N.² Oncioiu, G.³ Luches, A.⁴ Martino, M.⁵ Nassisi, V.⁶ Radiotis, E.⁷ Drigo, A.V.⁸ Ganatsios, S.⁹

21
- 0000294867
- (1991) J. Appl. Phys , vol.69 , pp. 1687
- D’Anna, E.¹ Leggieri, G.² Luches, A.³ Martino, M.⁴ Drigo, A.V.⁵ Mihailescu, I.N.⁶ Ganatsios, S.⁷

22
- 84950573410
- LAMILADIS ’91, Chernovtsy, Ukraine, April, edited by N. I. Koroteev, V. Ya. Panchenko
- (1991) Proceedings of the International Conference on Laser Microtechnology and Laser Diagnostics of Surfaces
- D’Anna, E.¹ De Giorgi, M.L.² Luches, A.³ Martino, M.⁴ Craciun, V.⁵ Mihailescu, I.N.⁶ Mengucci, P.⁷

23
- 85041884441
- (1991) Proc. SPIE , vol.1723 , pp. 14

24
- 84957282142
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2463
- Burrow, B.J.¹ Morgan, A.E.² Ellwanger, R.C.³

25
- 84957284408
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2784
- Erasberger, C.¹ Nickerson, J.² Smith, T.³

26
- 84957280019
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2789
- Hofmann, S.¹

27
- 0021872410
- (1985) Appl. Phys. Lett , vol.46 , pp. 110
- Ursu, I.¹ Mihailescu, I.N.² Nanu, L.³ Prokhorov, A.M.⁴ Konov, V.I.⁵ Ralchenko, V.G.⁶

28
- 0026711749
- (1992) Appl. Surf. Sci , vol.54 , pp. 353
- D’Anna, E.¹ Leggieri, G.² Luches, A.³ Martino, M.⁴ Perrone, A.⁵ Mengucci, P.⁶ Mihailescu, I.N.⁷

29
- 84989716070
- (1986) Phys. Status Solidi A , vol.96 , pp. 89
- Armigliato, A.¹ Queirolo, G.² Valdrw, G.³

30
- 0003786103
- (McGraw-Hill, New York)
- (1958) Kinetic Theory of Gases , pp. 32
- Present, R.D.¹

31
- 5544245723
- (Nauka, Moscow)
- (1980) Methods of Numerical Analysis
- Marchiuk, G.I.¹

32
- 0004207635
- (Springer, London)
- (1991) Laser Material Processing
- Steen, W.M.¹

33
- 0003587972
- (Plenum, New York)
- (1983) Laser Processing and Analysis of Materials
- Duley, W.W.¹

34
- 0003490481
- [formula omitted], (Academic, New York)
- (1976) Lasers, Effects and Applications
- Duley, W.W.¹

35
- 0004261584
- (Adam Hilger-IOP, Bristol)
- (1991) Laser Heating of Metals
- Prokhorov, A.M.¹ Konov, V.I.² Ursu, I.³ Mihailescu, I.N.⁴

36
- 0003972070
- 6th ed. (Pergamon, New York)
- (1980) Principles of Optics
- Born, M.¹ Wolf, E.²

37
- 0021155526
- (1984) Appl. Opt , vol.23 , pp. 18
- Anisimov, V.N.¹ Arutyuniyan, R.V.² Baranov, V.Y.³ Bolshov, L.A.⁴ Velikhov, E.P.⁵ Dolgov, V.A.⁶ Ilyn, A.I.⁷ Kovalevich, A.M.⁸ Kraposhin, V.S.⁹ Malyuta, D.D.¹⁰ Matveeva, L.A.¹¹ Mezheveov, V.S.¹² Pismennyi, V.D.¹³ Sebrant, A.Y.¹⁴ Stepanova, Y.Y.¹⁵

38
- 85041875452
- (1984) Poverhnosti , vol.N9 , pp. 119
- Anisimov, V.N.¹ Baranov, V.Y.² Bolshov, L.A.³ Ilyn, A.I.⁴ Kopetskii, C.V.⁵ Kraposhin, V.S.⁶ Malyuta, D.D.⁷ Matveeva, L.A.⁸ Mezheveov, V.S.⁹ Pismennyi, V.D.¹⁰ Sebrant, A.Y.¹¹

39
- 0342763558
- (1988) J. Appl. Phys , vol.63 , pp. 2796
- Repeta, M.¹ Dignard-Bailey, L.² Curie, J.F.³ Brebner, J.J.⁴ Barba, K.⁵

40
- 0003428292
- Springer Series in Materials Science, Vol. 2 (Springer, Berlin)
- (1986) Laser-Beam Interactions with Materials
- von Allmen, M.¹

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