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Volumn 128, Issue 3, 1993, Pages 181-194
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Absolute cross sections for the dissociative electron impact ionization of the CFx (x = 1-3) free radicals
a a a a |
Author keywords
Electron collision cross sections; Electron impact ionization; Free radicals; Plasma processing
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Indexed keywords
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EID: 0001398861
PISSN: 01681176
EISSN: None
Source Type: Journal
DOI: 10.1016/0168-1176(93)87067-3 Document Type: Article |
Times cited : (76)
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References (27)
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