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Volumn 128, Issue 3, 1993, Pages 181-194

Absolute cross sections for the dissociative electron impact ionization of the CFx (x = 1-3) free radicals

Author keywords

Electron collision cross sections; Electron impact ionization; Free radicals; Plasma processing

Indexed keywords


EID: 0001398861     PISSN: 01681176     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-1176(93)87067-3     Document Type: Article
Times cited : (76)

References (27)
  • 12
    • 84910983368 scopus 로고
    • Idaho National Engineering Laboratory, EG&G Idaho Inc, Idaho Falls, ID, Version 4.02
    • (1988) SIMION
  • 25
    • 0004153355 scopus 로고
    • Ionization Potentials, Appearance Potentials and Heats of Formation of Gaseous Positive Ions
    • Natl. Bur. Stand. No. 36, Washington, D.C
    • (1969) Natl. Stand. Ref. Data


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.