Verification of frequency scaling laws for capacitive radio-frequency discharges using two-dimensional simulations

Physics of Fluids B

Volumn 5, Issue 7, 1993, Pages 2719-2729

  Vahedi, V ^a   Birdsall, C K ^a   Lieberman, M A ^a   DiPeso, G ^b   Rognlien, T D ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

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EID: 0001383489     PISSN: 08998221     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.860711     Document Type: Article

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