Matrix isolation Fourier transform infrared spectroscopic study of energetic nitrogen fluxes applied to fabrication of nitride thin films. Observation of N3 radical and quantitative estimation of matrix-isolated N atoms

Journal of Applied Physics

Volumn 82, Issue 4, 1997, Pages 1921-1924

  Khabashesku, V N ^a   Margrave, J L ^a   Waters, K ^b   Schultz, J A ^b  

^a RICE UNIVERSITY   (United States)

^b Ionwerks   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001378222     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366271     Document Type: Article

References (13)

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