Synchrotron radiation micro-Fourier transform infrared spectroscopy applied to photoresist imaging

Applied Physics Letters

Volumn 71, Issue 6, 1997, Pages 847-849

  Ocola, L E ^a   Cerrina, F ^a   May, Tim ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001372676     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119665     Document Type: Article

References (14)

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