-
15
-
-
0042260172
-
Characterization of a Ti vacuum arc and the structure of deposited Ti and TiN films
-
(1987)
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
, vol.5
, pp. 22
-
-
Martin, P.J.1
Netterfield, R.P.2
McKenzie, D.R.3
Falconer, I.S.4
Pacey, C.5
Thomas, P.6
Sainty, W.G.7
-
27
-
-
85025563348
-
-
H. Brandolf, US Patent 4 511 593, 1985.
-
-
-
-
29
-
-
85025549304
-
-
S. Ramalingham, US Patent 4 673 477, 1987.
-
-
-
-
33
-
-
85025577857
-
-
I. I. Axenov, V. A. Belous, V. G. Padalka and V. M. Khoroshikh, US Patent 4 452 686, 1984.
-
-
-
-
35
-
-
85025561603
-
-
G. V. Kljuchko, V. G. Padalka, L. P. Sablev and R. I. Stupak, US Patent 4 492 845, 1985.
-
-
-
|