Observation of CH2 radical and comparison with CH3 radical in a rf methane discharge

Applied Physics Letters

Volumn 55, Issue 13, 1989, Pages 1292-1294

  Kojima, H ^a   Toyoda, H ^a   Sugai, H ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001348479     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.101636     Document Type: Article

References (10)