Epitaxial growth of Al2O3/Si heterostructures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1451-1455

  Zborowski, J T ^a   Golding, T D ^b   Forrest, R L ^b   Marton, D ^b   Zhang, Z ^b  

^a GEM Research Inc   (United States)

^b University of Houston   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001338036     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

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