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Journal of Applied Physics
Volumn 68, Issue 3, 1990, Pages 1050-1058
Recrystallization and grain growth phenomena in polycrystalline Si/CoSi2 thin-film couples
(2)
Nygren, Stefan
a
Johansson, Stefan
b
a
ROYAL INSTITUTE OF TECHNOLOGY
(
Sweden
)
b
UPPSALA UNIVERSITY
(
Sweden
)
Author keywords
[No Author keywords available]
Indexed keywords
EID
:
0001334590
PISSN
:
00218979
EISSN
:
None
Source Type
:
Journal
DOI
:
10.1063/1.346744
Document Type
:
Article
Times cited : (
43
)
References (
25
)
1
16744367662
(1982)
Electrochem. Soc.
, vol.82‐7
, pp. 232
Lucchese, C.J.
1
2
0038673430
(1986)
J. Vac. Sci. Technol. B
, vol.4
, pp. 1358
Van den hove, L.
1
Wolters, R.
2
Maex, K.
3
De Keersmaecker, R.
4
Declerck, G.
5
3
0023329252
(1987)
J. Electrochem. Soc.
, vol.134
, pp. 925
Morgan, A.E.
1
Broadbent, E.K.
2
Delfino, M.
3
Coulman, B.
4
Sadana, D.K.
5
4
5244360942
(1987)
Electrochem. Soc.
, vol.87‐11
, pp. 446
Liu, R.
1
Baiocchi, F.A.
2
Heimbrook, L.A.
3
Kovalchick, J.
4
Malm, D.L.
5
Williams, D.S.
6
Lynch, W.T.
7
5
84950915789
(unpublished).
Jiang, H.
1
Osburn, C.M.
2
Smith, P.
3
Xiao, Z.G.
4
Griffis, D.
5
McGuire, G.
6
Rozgonyi, G.A.
7
6
0008812756
(1985)
J. Appl. Phys.
, vol.58
, pp. 971
Vaidya, S.
1
Murarka, S.P.
2
Sheng, T.T.
3
7
0024681116
(1989)
IEEE Trans. Electron Devices
, vol.ED‐36
, pp. 1087
Nygren, S.
1
Amm, D.T.
2
Levy, D.
3
Torres, J.
4
Göltz, G.
5
Ternisien d’Ouville, T.
6
Delpech, P.
7
8
0021252055
(1984)
J. Electron Microsc. Tech.
, vol.1
, pp. 53
Brauman, J.C.
1
Sinclair, R.R.
2
9
0022080137
(1985)
Thin Solid Films
, vol.128
, pp. 283
d’Heurle, F.M.
1
Petersson, C.S.
2
10
0017983205
(1978)
J. Electrochem. Soc.
, vol.125
, pp. 927
Kamins, T.I.
1
Mandurah, M.M.
2
Saraswat, K.C.
3
11
0017517682
(1977)
J. Appl. Phys.
, vol.48
, pp. 2886
Pretorius, R.
1
Liau, Z.L.
2
Lau, S.S.
3
Nicolet, M.A.
4
12
0016572098
(1975)
J. Appl. Phys.
, vol.46
, pp. 4678
Nakamura, K.
1
Nicolet, M.A.
2
Mayer, J.W.
3
Blattner, R.J.
4
Evans, C.A.
5
13
0016939334
(1976)
J. Appl. Phys.
, vol.47
, pp. 1278
Nakamura, K.
1
Otowolafe, J.O.
2
Lau, S.S.
3
Nicolet, M.A.
4
Mayer, J.W.
5
Shima, R.
6
14
0001001656
(1986)
Appl. Phys. Lett.
, vol.48
, pp. 767
Zheng, L.R.
1
Hung, L.S.
2
Feng, S.Q.
3
Revesz, P.
4
Mayer, J.W.
5
Miles, G.
6
15
0242669407
(1987)
Appl. Phys. Lett.
, vol.51
, pp. 421
Phillips, J.R.
1
Zheng, L.R.
2
Mayer, J.W.
3
16
0024304830
(1989)
Thin Solid Films
, vol.168
, pp. 325
Nygren, S.
1
Norström, H.
2
Östling, M.
3
Chatfield, C.
4
Rydén, K.H.
5
Buchta, R.
6
Petersson, C.S.
7
17
84950753472
(unpublished).
Nygren, S.
1
18
0024070733
(1988)
J. Electrochem. Soc.
, vol.135
, pp. 2312
Kim, H.J.
1
Thompson, C.V.
2
19
0020171579
(1982)
J. Appl. Phys.
, vol.53
, pp. 5678
d’Heurle, F.
1
Petersson, S.
2
Stolt, L.
3
Strizker, B.
4
20
0022561250
(1986)
J. Mater. Res.
, vol.1
, pp. 205
d’Heurle, F.M.
1
Gas, P.
2
21
0018517449
(1979)
J. Electron. Mater.
, vol.8
, pp. 641
Baglin, J.
1
Dempsey, J.
2
Hammer, W.
3
d’Heurle, F.
4
Petersson, S.
5
Serrano, C.
6
22
0019081768
(1980)
J. Appl. Phys.
, vol.51
, pp. 5755
Mandurah, M.M.
1
Saraswat, K.C.
2
Helms, R.
3
Kamins, T.I.
4
23
0013020797
(1988)
J. Appl. Phys.
, vol.64
, pp. 2973
Thomas, O.
1
Gas, P.
2
Charai, A.
3
LeGoues, F.K.
4
Michel, A.
5
Scilla, G.
6
d’Heurle, F.M.
7
24
0042324987
(1987)
J. Vac. Sci. Technol. B
, vol.5
, pp. 865
Murarka, S.P.
1
Chang, C.C.
2
Adams, A.C.
3
25
0024088821
(1988)
Jpn. J. Appl. Phys.
, vol.27
, pp. L1809
Adachi, E.
1
Aoyama, T.
2
Konishi, N.
3
Suzuki, T.
4
Okajima, Y.
5
Miyata, K.
6
* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.
