A new high energy implantation facility for materials research at the CRN, Strasbourg

Nuclear Inst. and Methods in Physics Research, B

Volumn 79, Issue 1-4, 1993, Pages 664-667

  Stoquert, J P ^a   Grob, J J ^a   Muller, D ^a   Rohr, P ^a   Siffert, P ^a  

^a CENTRE DE CALCUL DE L INSTITUT NATIONAL DE PHYSIQUE NUCLEAIRE ET DE PHYSIQUE DES PARTICULES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001299024     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(93)95438-B     Document Type: Article

References (7)

1. High-energy ion implantation for ULSI
2. MeV ion implantation in GaAs technology
3. A 3-MV Pelletron for materials research at Heidelberg