Operation Support System Driven by SEM Image for Micro Assembly

IEEJ Transactions on Sensors and Micromachines

Volumn 119, Issue 7, 1999, Pages 359-367

  Okusa, Takenori ^a   Nakao, Masayuki ^a   Tsuchiya, Kensuke ^a   Hatamura, Yotaro ^a   Sato, Tomomasa ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001285798     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.119.359     Document Type: Article

References (5)

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2. A.-L. Tiensuu, M. Bexell, et al, “Assembling three-dimensional microstructures uging gold-silicon eutectic bonding”, Sensors and Actuators A45 (1994), pp. 227-236, 1994.
3. Stephen Palm, Taketoshi Mori and Tomomasa Sato, “Behavior Sampling: A recording mechanism for visually based teleoperation”, Proc. of IROS '98, Vol. 3, pp. 1753-1760, 1998.
4. Stefan Johansson, “Techniques for the fabrication of micro robot system”, Preprints of the Fourth IFAC Symposium on Robot Control, pp. 755-762, 1994.
5. M. Nakao, et al, “Breakthroughs in 3-D Ultra-fine Shape Fabrication by Dynamic FAB Etching”, Proc. of ASPE 95, 376, 1995.