The Removal of Submicron Particles in Liquid-based Cleaning

Journal of Adhesion

Volumn 67, Issue 1-4, 1998, Pages 181-193

  Busnaina, Ahmed A ^a   Dai, Fen ^a  

^a CLARKSON UNIVERSITY   (United States)

Author keywords

Acoustic streaming; Megasonic cleaning; Particle removal; Removal mechanisms; Submicron particles; Surface cleaning

Indexed keywords

EID: 0001284201     PISSN: 00218464     EISSN: None     Source Type: Journal    
DOI: 10.1080/00218469808011107     Document Type: Article

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