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Journal of Applied Physics

Volumn 69, Issue 8, 1991, Pages 4273-4281

Determination of nanometer structures and surface roughness of polished Si wafers by scanning tunneling microscopy

(3) Hartmann, E a Hahn, P O a Behm, R J a

a UNIVERSITY OF MUNICH (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001273566 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.348399 Document Type: Article

Times cited : (48)

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