Polarization interferometer for measuring the flying height of magnetic read-write heads

Optics Letters

Volumn 21, Issue 6, 1996, Pages 441-443

  De Groot, Peter ^a   Deck, Leslie ^a   Soobitsky, James ^a   Biegen, James ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001227878     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.21.000441     Document Type: Article

References (9)

1. W. Stone, Commonwealth Eng. 1, 115 (1921).
2. J. M. Fleischer and C. Lin, IBM J. Res. Dev. 18, 529 (1974).
3. G. L. Best, D. E. Home, A. Chiou, and H. Sussner, IEEE Trans. Magn. MAG-22, 1017 (1986).
4. T. Ohkubo and J. Kishegami, Trans. ASME 110, 148 (1988).
5. D. A. Fridge and K. A. Miller, U.S. patent 4,593,368 (June 3, 1986).
6. C. Lacey, J. A. Adams, E. W. Ross, and A. Cormier, Proc. DiskCon '92 (1992), p. 27.
7. R. Smythe and R. Moore, Proc. SPIE 429, 16 (1983).
8. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1989), pp. 271-283.
9. C. Lacey, R. Shelor, A. J. Cormier, and R. E. Talke, IEEE Trans. Magn. 29, 3906 (1993).