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Volumn 63, Issue 12, 1992, Pages 5714-5725

Thermally stimulated current measurements of SiO2 defect density and energy in irradiated metal-oxide-semiconductor capacitors

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0001211843     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1143354     Document Type: Article
Times cited : (40)

References (117)
  • 25
    • 0026396455 scopus 로고
    • Figures 1, 9–11, and 12(a) and 12(c) have originally appeared in Ref. 20. Figure 2 of the text is a corrected version of the system diagram shown in Ref. 20. The energy scales in Ref. 20 are in error, as discussed in Ref. 59.
    • (1991) IEEE Trans. Nucl. Sci. , vol.38 , pp. 1066
    • Fleetwood, D.M.1    Reber, R.A.2    Winokur, P.S.3
  • 61
    • 84954081792 scopus 로고    scopus 로고
    • Model 6–6-6-BX, Thermcraft Incorporated, Winston-Salem, NC
  • 62
    • 84954082277 scopus 로고    scopus 로고
    • Model RS-211, Wahl Instruments, Culver City, CA
  • 63
    • 84954082557 scopus 로고    scopus 로고
    • Model LIC 2748–24, Loranger International, Warren, PA. Although the (C72900) Spinodal plating on these sockets is not rated to 350 °C by Loranger, we have ramped them from 20°C to 350°C more than 500 times to date with no measurable degradation
  • 64
    • 84954081785 scopus 로고    scopus 로고
    • No. 1102 (40 Ω) Cable, Coaxco, Tualatin, OR. The inner shield of the triaxial cables is grounded at both the HP4140B and the bulkhead. The outer shield is grounded at the HP4140B but isolated at the bulkhead, thus providing shielding without allowing current flow through the outer shield
  • 65
    • 84954082485 scopus 로고
    • The HP4140B picoammeter settings are: function (I), current range (auto), filter (on, which adds an additional 60 ms to each 600 ms of response time on the [formula omitted] scale to reject 60 Hz noise), integration time (long, corresponding to ∼ 1066.7 ms on the [formula omitted] A scale, and 2133.3 ms on the [formula omitted] A scale—raw current measurements are taken by the HP4140B at 8.3 ms intervals), and current limit ([formula omitted] A, which of course is never exceeded for a working capacitor). Scale attributes are quoted from the HP4140B pA Meter/dc Voltage Source manual, No. 04140–90021, Yokogawa-Hewlett-Packard, Ltd.
    • (1980)
  • 66
    • 84954081306 scopus 로고    scopus 로고
    • The high leakage current shown in Fig. 5 for ceramic DIPs also suggests that care must be taken in the selection of packages for high-temperature applications of microelectronic circuits, even if junction leakages in the electronics are minimized via the use of silicon-on-insulator material, for example (Refs. 55 and 56)
  • 69
    • 84954081173 scopus 로고    scopus 로고
    • TSC measurements at positive bias can be quite sensitive to charge trapped near the gate/[formula omitted] interface, as may be important following negative-bias irradiation. This is discussed in detail in Ref. 20, in which it is shown that TSC measurements under varying bias conditions can provide information on the location of trapped positive charge in the oxide. However, because charge trapped near the gate/[formula omitted] interface has much less effect on MOS electrical response than charge trapped near the Si/[formula omitted] interface, TSC measurements at negative bias following positive-bias irradiation provide the best measure of a MOS structure’s basic radiation response
  • 70
    • 84954082471 scopus 로고    scopus 로고
    • Potential difficulties in interpreting TSC measurements for devices with large trapped-hole densities have been discussed in the context of space-charge limiting effects in Refs. 13 and 20. Here we emphasize that capacitance changes can also reduce the measured TSC, which extends and reinforces the discussions in Refs. 13 and 20, which do not address capacitance-change effects
  • 74
    • 84954082315 scopus 로고    scopus 로고
    • As shown in Fig. 12(a) below, the 6.5 nC of trapped-hole charge in these oxides is partially offset by 2.9 nC of trapped-electron charge in these measurements, thus rendering conventional C-V estimates (Sec. III) of trapped-hole density invalid
  • 75
    • 84954082087 scopus 로고    scopus 로고
    • One should not take the actual capacitance values in Fig. 11 seriously when considering quantitative changes in TSC current due to capacitance changes. Figure 11 shows the high-frequency capacitance of the MOS structure. The more relevant parameter is the quasi-static (low-frequency) capacitance (Ref. 63). The quasi-static capacitance differs significantly from the high-frequency capacitance, especially in inversion, due to the finite minority-carrier lifetime in Si (Ref. 63). This point does not affect the essence of the discussion of Fig. 11 which is that avoiding this region of the C-V curve will minimize errors in TSC measurements, but is important to remember if one actually wishes to calculate the magnitude of Ic in Eq. (11).
  • 78
    • 84954081674 scopus 로고    scopus 로고
    • For capacitors having Si substrates with long minority-carrier lifetimes, this increase in current may even mimic TSC due to radiation-induced charge or to bias-temperature instabilities. If special precautions are not taken, this can be a particular concern for TSC measurements made at a very high ramp rate.
  • 80
    • 84954082151 scopus 로고    scopus 로고
    • MIL-STD 883D, Test Method 1019.4, issued by the Defense Electronics Support Center, Dayton, OH, January 1992.
  • 103
    • 84954082082 scopus 로고    scopus 로고
    • Model 4100 Semiconductor X-ray Irradiator, ARACOR, Sunnyvale, CA
  • 104
    • 84954082612 scopus 로고    scopus 로고
    • AECL Gammacell 220, Nordion International, Kanata, Ontario, Canada
  • 105
    • 84954080957 scopus 로고    scopus 로고
    • Concern has been expressed in a previous study (Ref. 20) that TSC measurements may cause problems for (highly penetrating) Co-60 irradiations of mounted capacitors because of radiation-induced charging of the platform. We have duplicated the conditions of the Co-60 irradiations of Fig. 13 for bare platforms and find that, at the very most, ∼0.15 nC of the total charge collected during TSC measurements of MOS capacitors irradiated to 4.0 krad ([formula omitted]) may be attributable to radiation-induced platform charging. Moreover, irradiations of platforms in a Co-60 source to 1.0 Mrad ([formula omitted]) led to at most ∼0.3 nC of charge. Thus, as long as the radiation-induced oxide-trap charge is well above these levels, as is the case here, there is not a significant problem in measuring the TSC of Co-60 irradiated capacitors. This problem is avoided entirely during x-ray irradiations simply by shielding the low-energy x rays from the bare surfaces of the platform (Ref. 20)
  • 106
    • 84954081057 scopus 로고    scopus 로고
    • In general, Co-60 and ∼10 keV x-ray irradiations can lead to significantly different oxide-and interface-trap charge densities because of dose enhancement and electron-hole recombination effects (Ref. 85, for example). The remarkable similarity between the x ray and Co-60 response in Fig. 13 suggests a near cancellation of these effects for these structures and irradiation conditions. The key point in Fig. 13 is that the difference in radiation energy did not lead to significant differences in the energy distributions of the trapped holes, thus allowing simpler comparison between radiation results for the two types of sources
  • 116
    • 0025595078 scopus 로고
    • and references therein. TSC measurements may be only of limited use to detector materials with high leakage currents, or those that delaminate, at high temperatures. Nevertheless, it is possible that the TSC method may be applicable over a limited temperature range for some types of these devices
    • (1990) IEEE Trans. Nucl. Sci. , vol.37 , pp. 2034
    • Moriwaki, M.M.1    Srour, J.R.2    Lou, L.F.3    Waterman, J.R.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.