Dual tunneling-unit scanning tunneling microscope for length measurement based on crystalline lattice

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 1, 1997, Pages 174-177

  Zhang, Haijun ^a,b   Higuchi, Toshiro ^a,c   Nishioki, Nobuhisa ^a,d  

^a KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^b ZHEJIANG UNIVERSITY   (China)

^c UNIVERSITY OF TOKYO   (Japan)

^d MITUTOYO CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001202633     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589245     Document Type: Article

References (9)

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8. H. Zhang and T. Higuchi, in Annual Reports of Kanagawa Academy of Science and Technology, Japan, 1995 (unpublished), p. 35.
9. T. Higuchi, in Proceedings of the 2nd International Symposium of Robotics Research, 1984 (unpublished), p. 144.