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Volumn 2, Issue 10, 1996, Pages 1269-1274

Processing of blue boron nitride thin films with a solid-gas reaction

Author keywords

Borazine; Boron nitride; Materials science; Thin films; Titanium complexes

Indexed keywords

AUGER ELECTRON SPECTROSCOPIES (AES); BORAZINE; BORON NITRIDE THIN FILMS; NUCLEAR REACTION ANALYSIS; RUTHERFORD BACK-SCATTERING; SYNTHESIS AND PROCESSING; THICKNESS OF THE FILM; TITANIUM COMPLEXES;

EID: 0001192552     PISSN: 09476539     EISSN: 15213765     Source Type: Journal    
DOI: 10.1002/chem.19960021014     Document Type: Article
Times cited : (9)

References (45)
  • 28
    • 0003818607 scopus 로고
    • American Society for Test Materials (ASTM). Joint Committee on Powder Diffraction Standard, Easton, File No. 9-12
    • American Society for Test Materials (ASTM). L. Berry et al., Inorganic Index to the Powder Diffraction File, Joint Committee on Powder Diffraction Standard, Easton, 1971 File No. 9-12.
    • (1971) Inorganic Index to the Powder Diffraction File
    • Berry, L.1
  • 36
    • 84891298696 scopus 로고    scopus 로고
    • note
    • The physical methods we applied have detection limits of the order of 0.5 atom %; therefore we cannot exclude the fact that traces of titanium are in the layer.
  • 43
    • 0000562889 scopus 로고
    • W. Chu, Phys. Rev. 1976, A13, 2057-2060.
    • (1976) Phys. Rev. , vol.A13 , pp. 2057-2060
    • Chu, W.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.