Minimized response time of optical emission and mass spectrometric signals for optimized endpoint detection

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 4, 1996, Pages 2531-2536

  Thomas III, S ^a   Chen, H H ^a   Hanish, C K ^a   Grizzle, J W ^a   Pang, S W ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001185963     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588764     Document Type: Article

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