A level set approach to a unified model for etching, deposition, and lithography II: Three-dimensional simulations

Journal of Computational Physics

Volumn 122, Issue 2, 1995, Pages 348-366

  Adalsteinsson, D ^a   Sethian, J A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001163571     PISSN: 00219991     EISSN: 10902716     Source Type: Journal    
DOI: 10.1006/jcph.1995.1221     Document Type: Article

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