Surface roughness of thin layers - A comparison of XRR and SFM measurements

Applied Surface Science

Volumn 141, Issue 3-4, 1999, Pages 357-365

  Filies, O ^a   Boling O ^a   Grewer, K ^a   Lekki, J ^b   Lekka, M ^b   Stachura, Z ^b   Cleff, B ^a  

^a UNIVERSITY OF MÜNSTER   (Germany)

^b INSTITUTE OF NUCLEAR PHYSICS   (Poland)

Author keywords

07.79; 68.35Bs; 78.20Ci; APN; Fractal surface scaling; SFM; Surface roughness; SZK; Thin layers; X ray reflectivity (XRR); XC

Indexed keywords

EID: 0001161920     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00524-8     Document Type: Article

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