Radial shearing interferometer for in-process measurement of diamond turning

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3173, Issue , 1997, Pages 280-285

  Kohno, Tsuguo ^a   Matsumoto, Daiji ^a   Yazawa, Takanori ^a  

^a NIKON CORPORATION   (Japan)

Author keywords

Figure measurement; In process measurement; Interferometer; On machine measurement; Radial shearing; Zone plates

Indexed keywords

FIGURE MEASUREMENT; IN-PROCESS MEASUREMENT; ON-MACHINE MEASUREMENT; RADIAL SHEARING; ZONE PLATES;

CHEMICAL SENSORS; DIAMONDS; HIGH SPEED CAMERAS; HIGH SPEED PHOTOGRAPHY; INTERFEROMETERS; INTERFEROMETRY; MIRRORS; OPTICAL INSTRUMENTS; OPTICAL TESTING; PHOTOGRAPHY; SHEARING; SURFACE PHENOMENA; TURNING;

MEASUREMENTS;

EID: 0001140267     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.294519     Document Type: Conference Paper

References (3)

1. T.Kohno, Y.Okazaki, N.Ozawa, K.Mitsui, and M.Omoda: In-process measurement and a Workpiece-referred form accuracy control system(WORFAC), Precision Engineering, Vol.11, No.1(1989) pp.9-14.
2. T.Kohno and S.Tanaka: Figure Measurement of Concave Mirror by Fiber-Grating Hartmann Test, Optical Rev́iew, Vol.1, No.l (1994) pp. 118-120.
3. M.Takeda, H.Ina, and S.Kobayashi: J.Opt.Soc.Am., Vol.72(1982) P.156.